Features
• No contact with wafer for transport
• Low particle
• Low ion contamination
• Low outgassing
Specification
| Model number | T-WSR200X | |
|---|---|---|
| Material | Conductive PC | |
| Surface Resistance |
R < 1.0×10^7 Ω | |
| Carton size (500pcs/carton) |
430mm × 420mm × 290mm weght：5.5kg |
|
Ion contamination comparison
| Sample | Anion | ||||||
|---|---|---|---|---|---|---|---|
| F | Cl | NO2 | Br | NO3 | SO4 | PO4 | |
| T-WSR200W | ND | ND | ND | ND | ND | ND | ND |
| Sample | Cation | ||||||
| Li | Na | NH4 | K | Mg | Ca | ||
| T-WSR200W | ND | ND | ND | ND | ND | ND | |
※Unit : ppb(μg /l)
* This data is an actual measurement value, not a uaranteed value.